Why use quartz tank for semiconductor wet etch process?

In semiconductor wet etching process, experts suggest that you choose an etching system that uses quartz tank (or is made from quartz materials). And there are compelling reasons why this is so. Well, aside from it is made from the second most abundant mineral that can be found in the Earth's continental crust, some practical reasons why it is recommended (and why should you use quartz tank) are the following:

• Durability - considered to be harder than granite and most metals, it makes sense that quartz are durable and so anything that is made from quartz is considered durable as well. This is one of the reasons why quartz tank is popular in the industry.
• Non-reactivity to a variety of chemistries - quartz is also one of the materials that do not react to chemistries (e.g. it does not react with acid) and thus, the substrate that is processed inside it safe from contamination.
• High purity - quartz provides high purity standard so there is nothing to worry about  this problem. This is very important most especially when processing semiconductors wherein high purity is absolutely necessary.

Aside from quartz tanks, some quartz products that can be used in processing works are the following:

• Quartz boats - also known as substrate carriers; designed to accommodate wafers of 4", 6", 8", and 12" in diameter; they can come in various designs or sizes and manufacturers can also design according to your specifications.
• Quartz chambers - designed to accommodate plasmas that can reach extremely high temperatures but need high purity and visual verification; they are ideal because they are high resistant to heat.
• Quartz drains - are generally placed on the side or at the bottom part of quartz tanks.; they can be used to recirculate chemistry or for tank evacuation.
• Quartz aspirators - these are also known as filter pumps; the tool is used to produce a vacuum by means of the Venturi effect; this is used in high temperature applications.
• Quartz boat adapters - can reduce cost in wafer processing; can also help for increased production throughput.